Cover
Volume 7, Special Issue 4 (2026)

Published: August 25, 2026

Pages: 314-322

Research Article

Compositionally engineered TiO₂–SiO₂ mixed dielectric thin films as a single-layer broadband beam splitter: Design, fabrication, and optical performance

Abstract

Standard multilayer dielectric beam splitter is limited by spectrum interference ripples, high production complexity and strict tolerance of the thickness. Here we report a compositionally tuned TiO2-SiO2 mixed dielectric thin film as an effective single-layer broadband beam splitter. The composite films were produced on glass substrates with pulsed laser deposition (PLD) which allowed fine control over layer thickness and equilibrium stoichiometry by varying the number of laser pulses. The TiO₂:SiO₂ ratio was optimized using the effective medium model of Lorentz-Lorenz to attain a refractive index in between (~1.95-2.05) for controlled amplitude division with no multilayer interference stacking. X-ray diffraction (XRD) study revealed a nanostructured mixed-phase morphology using crystallite sizes in the range of 16-46 nm, ideal for low-scattering optical applications. The transmission-reflection ratios were steady and adjustable from 65/35 to 80/20 with small spectral ripples (ΔT_ripple < 4%) as demonstrated by UV–Vis–NIR spectroscopy in the range 400–1100 nm. The experimental results agree well with transfer matrix method (TMM) simulations, which validates the effective refractive index technique. The suggested single-layer design outperforms existing multilayer designs in terms of structural complexity, thickness sensitivity and number of manufacturing processes, while maintaining broadband and spectrally flat optical performance. Here, we show a simple and scalable way to achieve broadband beam splitting by changing the refractive index in a single dielectric layer.

References

  1. Chen G, Banerjee PP, Rumi M, Sun L, Stevenson PR, Slagle J, et al. Bandpass filter characteristics of multilayer metallo-dielectric structures. Proc SPIE. 2024; 13109:51–57.
  2. Cai W, et al. Colored radiative cooling and flame-retardant polyurethane-based coatings: Selective absorption/reflection in solar waveband. Small. 2024; 20:2402349.
  3. Aïssa B, Hossain MI, Zekri A, Abdallah AA, Benito VB. Highly stable anti-reflection and anti-dust hard silica coating with controlled mechanical and optical properties for harsh desert environment applications. Sol Energy. 2025; 293:113485.
  4. Stîngescu ML, Șopronyi MA, Antohe Ș, Scărișoreanu ND. Metal oxide thin films for advanced photonic applications. Crystals. 2026;16(3):164. doi:10.3390/cryst16030164.
  5. Jin Q, et al. Inkjet-printed optical interference filters. Nat Commun. 2024; 15:3372.
  6. Paul P. Development and properties of all-dielectric and metal-dielectric heterostructures at atomic scale [doctoral dissertation]. Jena (Germany): Friedrich Schiller University Jena; 2023.
  7. Ghasemzadeh S, et al. Design and fabrication of the high-precision beam splitter with stress compensation analysis for infrared band-pass filters. Optik. 2025; 327:172300.
  8. Nur-E-Alam M, et al. Design, fabrication, and physical properties analysis of laminated Low-E coated glass for retrofit window solutions. Energy Build. 2024; 318:114427.
  9. Kui W, Xianjun H, Tao T, Wentao H, Peiguo L. Design and demonstration of high-power density infrared nonlinear filtering window with EM shielding. Opt Express. 2024; 32:5956–5968.
  10. Olasoji AJ, Im SH. Functional coating layers for surface engineering of electronic displays. In: Functional Coatings for Advanced Electronics. Amsterdam: Elsevier; 2024. p. 1–28.
  11. Li H, et al. Design and optimization of double-layer structure for improved electromagnetic wave absorbing characteristic of single-layer foam cement-based materials containing carbon black. J Build Eng. 2024; 89:109319.
  12. Zhang JY, et al. Terahertz spectroscopy and effective medium theory for thickness measurement of adhesive bonds. NDT E Int. 2024; 147:103216.
  13. Roy RR, Bordoloi S. Beer's law and Lorentz-Lorenz formula based optical sensor system for adulterant detection in lubricants. MAPAN. 2025:1–15.
  14. Ulhakim MT, et al. Determining the crystallite size of TiO₂/EG-water XRD data using the Scherrer equation. Indones J Appl Phys. 2024; 14:141–150.
  15. Lim JS, Yam FK. Structural parameters of CVD synthesized Ga₂O₃ nanostructures from X-ray diffraction analysis: A comparative study. Physica B. 2025; 699:416798.
  16. Chen HC, Chang CH, Chen KH. Optical and stress properties of ZrO₂/SiO₂ and TiO₂/SiO₂ anti-reflective coatings deposited by ion-beam-assisted deposition on a flexible substrate. Appl Opt. 2024;63(31):8280–8287. doi:10.1364/AO.540615.
  17. Sagar R. Metal oxide thin films as anti-reflection coatings for enhancing the photon to energy conversion efficiency of photovoltaic cells. In: Metal Oxides. Boca Raton (FL): CRC Press; 2025. p. 163–182.
  18. AlSultani MJ, Alias MF. Enhanced optoelectronics performance of hybrid self-power photodetectors GO:TiO₂-AD/n-Si heterojunctions. Karbala Int J Mod Sci. 2024;10(3):1. doi:10.33640/2405-609X.3362.
  19. Villeneuve-Faure C, Mitronika M, Dan AP, Boudou L, Ravisy W, Besland MP, et al. Nanoscale dielectric properties of TiO₂ in SiO₂ nanocomposite deposited by hybrid PECVD method. Nano Express. 2024;5(1):015010. doi:10.1088/2632-959X/ad220d.
  20. Ashery A, Gaballah AEH. Effect of n- and p-silicon substrate on dielectric constant and dielectric loss tangent of PPy-MWCNTs/TiO₂/Al₂O₃ structure. Silicon. 2023; 15:2083–2097. doi:10.1007/s12633-022-02056-0.